00883nam a2200205 a 4500001001500000005001500015008004100030040001900071049001700090052001800107082001500125100004800140245013500188260004500323300003400368502010000402653010400502900001900606963005200625WDM199700467  20201023105254980327s1995    us a       ZZ 000   eng    a011001c0110010 lWM222768fDP02a621.48bH772t0 a621.482211 a홍문표,g洪雯杓,d1963-0KAC20184945810aTwo-dimensional fluid modeling of an expanding plasma sheath, with applications to plasma source ion implantation/dby Munpyo Hong  aMadison:bUniversity of Wisconsin,c1995  axi, 144 leaves:bill.;c28 cm1 aThesis(Ph. D.) --bUniversity of Wisconsin:cNuclear Engineering and Engineering Physics,d1995  aTWODIMENSIONALaFLUIDaMODELINGaEXPANDINGaPLASMAaSHEATHaAPPLICATIONSaSOURCEaIONaIMPLANTATION10aHong, Mun-pyo.  aNuclearaEngineeringaandaEngineeringaPhysics