00961nam a2200217 c 4500001001500000005001500015008004100030040001900071041001300090049003200103052002200135056001400157082001500171100004800186245018100234260004200415300003600457502009200493653013200585963002600717KDM199803124  19980413151716980410s1998    gbkaf      SN 000   kor    a011001c0110010 akorbeng0 lEM1634760lEM1634761c2fDP01a530.48b전957ㅇ  a530.48240 a620.142211 a전찬욱,g全讚旭,d1969-0KAC20170542410a이온빔 보조 증발법에 의한 GaN 박막의 에피성장에 관한 연구=xEpitaxial growth of GaN thin film by IBAE (ion beam assisted evaporation) process/d전찬욱  a포항:b포항공과대학교,c1998  av,114장:b삽도,도판;c26cm1 a학위논문(박사) --b포항공과대학교 대학원:c재료금속공학과,d1998  a이온빔a증발법aGANa박막a에피성장aEPITAXIALaGROWTHaTHINaFILMaIBAEaIONaBEAMaASSISTEDaEVAPORATIONaPROCESS  a재료금속공학과