00861nam a2200217 c 4500001001500000005001500015008004100030040001900071049001700090052002000107056001400127082001700141100004800158245014000206260003600346300003200382502008000414653010100494900002800595963002000623KDM199731354  19971127105911971127s1997    ulka       AK 000   eng    a011001c0110010 lWM233280fDM02a661.0683bK499d  a571.88240 a661.06832211 a김연상,g金然祥,d1972-0KAC20172649110aDonpant effects in solid phase epitaxial growth of silicon=x실리콘 고체상 단결정 성장속도에서 dopant 효과/d김연상  a서울:b서울대학교,c1997  av, 22 leaves:bill.;c26 cm0 a학위논문(석사) --b서울대학교 대학원:c화학공학과,d1997  aDONPANTaSOLIDaPHASEaEPITAXIALaGROWTHaSILICONa실리콘a고체상a단결정a성장속도10aKim, Yˇon-sang,d1972-  a화학공학과