00930nam a2200217   4500001001500000005001500015008004100030040001900071041001300090049003200103052002100135056001300156082001400169100003600183245017600219260004200395300003000437502007600467653014900543963002000692KDM199723381  19970918145751970918s1997    tjka       CB 000   kor    a011001c0110010 akorbeng0 lEM1569182lEM1569183c2fDP01a559.9b이689ㅇ  a559.9240 a629.82191 a이창우,d1967-0KAC20185412110a이중서보를 이용한 초정밀 X-Y 테이블 평면 3자유도 위치제어=x3-Axis dual-servo control of an XYtheta-stage for ultraprecision positioning/d이창우  a대전:b한국과학기술원,c1997  aix,137장:b삽도;c26cm0 a학위논문(박사) --b한국과학기술원:c기계공학과,d1997  a이중서보a초정밀aXYa테이블a평면a3자유도a위치제어a3aAXISaDUALSERVOaCONTROLaXYTHETASTAGEaULTRAPRECISIONaPOSITIONING  a기계공학과