01051nam a2200217 c 4500001001500000005001500015008004100030040001900071041001300090049003200103052002300135056001500158082001600173100004800189245026800237260004200505300002900547502007600576653016100652963002000813KDM199722874  19970903110901970903s1997    tjka       CB 000   kor    a011001c0110010 akorbeng0 lEM1565024lEM1565025c2fDP01a530.498b김731ㅁ  a530.498240 a620.1982191 a김윤기,g金允基,d1968-0KAC20184692510a마이크로웨이브 플라즈마 화학증착법에 의한 다이아몬드 박막의 Heteroepitaxy 성장에 관한 연구=x(The)study on the heteroepitaxial growth of diamond films synthesized by microwave plasma enhanced chemical vapor deposition/d김윤기  a대전:b한국과학기술원,c1997  av,164장:b삽도;c26cm1 a학위논문(박사) --b한국과학기술원:c재료공학과,d1997  a마이크로웨이브a플라즈마a화학증착법a다이아몬드a박막aHETEROEPITAXYaDIAMONDaFILMSaMICROWAVEaPLASMAaCHEMICALaVAPORaDEPOSITION  a재료공학과