01026nam a2200217 c 4500001001500000005001500015008004100030040001900071049003000090052001800120056001300138082001500151100004800166245019400214260007100408300003300479502008700512653015100599900002500750963003300775KDM199635245  19970219150729970213s1996    tjka       CB 000   eng    a011001c0110010 lWM219103lWM219104c2fDP02a621.38bL494s  a569.2230 a621.382191 a이희덕,g李熙德,d1967-0KAC20170302710aSelf-Aligning silicon micromachining using electrochemical etching and its applications=x전기화학적 식각을 이용한 자기정렬 실리콘 미세가공과 그 응용/dHi-Deok Lee  a대전:bKorea Advanced Institute of Science and Technology,c1996  aiv, 94 leaves:bill.;c26 cm0 a학위논문(박사) --b한국과학기술원:c전기 및 전자공학과,d1996  aSELFALIGNINGaSILICONaMICROMACHININGaELECTROCHEMICALaETCHINGaAPPLICATIONSa전기화학a식각a자기정렬a실리콘a미세가공a응용10aLee, Hi-deok,d1967-  a전기a및a전자공학과