00707nam a2200181 a 4500001001300000005001500013008004100028049001700069052001600086082001400102100004700116245010300163260005300266300003200319502009200351504005400443650002800497WDM20070096120201102140259070816s2000    us a          000   eng  0 lWM517331fDP02a681.7bK98t0 a681.72211 a권오명g權伍明,d1968-0KAC20163623510aThermal design, fabrication, and imaging of MEMS and microelectronic structures/dby Ohmyoung Kwon  aAnn Arbor, MI:bUMI Dissertation Services,c2000  axiii, 115 p.:bill.;c23 cm1 aThesis(Ph.D.) --bUniversity of California,cEngineering-Mechanical Engineering,d2000.  aIncludes bibliographical references (p. 106-112). 4aMechanical engineering.