01055nam a2200241 k 4500001001500000005001500015008004100030040001900071041001300090049003200103052002100135056001300156082001800169100004800187245019200235260003600427300003800463502008000501653009800581900002700679940008700706963002000793KDM199516664  20200827112205950630s1995    ulkaf      AC 000   kor    a011001c0110010 akorbeng0 lEM1249548lEM1249549c2fDP01a569.8b주182ㅁ  a569.8230 a621.319372191 a주병권,g朱炳權,d1962-0KAC20130741410aMicroelectromechanical system을 위한 실리콘 웨이퍼의 直接 接合에 관한 硏究=xStudy on the direct bonding of silicon wafers for microelectromechanical system/d朱炳權  a서울:b高麗大學校,c1995  axvi,168장:b삽도,도판;c26cm1 a학위논문(박사) --b고려대학교 대학원:c전자공학과,d1995  aMICROELECTROMECHANICALaSYSTEMa실리콘a웨이퍼a접합aDIRECTaBONDINGaSILICONaWAFER10aJu, Byeonggwon,d1962-0 a마이크로일렉트로메카니컬 시스템을 위한 실리콘 웨이퍼의...  a전자공학과