00994nam a2200229 k 4500001001500000005001500015008004100030040001900071041001300090049003200103052002100135056001300156082001800169100004800187245017800235260003600413300003300449502010200482653011000584900002700694963004300721KDM199424052  20200825103743941202s1994    tgkaf      SC 000   kor    a011001c0110010 akorbeng0 lEM1171798lEM1171799c2fDP01a569.8b조889ㄷ  a569.8230 a621.381712191 a조찬섭,g曺贊燮,d1965-0KAC20163338010a多孔質 실리콘을 利用한 마이크로 머시닝과 加速度센서의 製造=xMicromachining using porous silicon and fabrication of acceleration sensor/d曺贊燮  a대구:b慶北大學校,c1994  a141p.:b삽도,도판;c26cm1 a학위논문(박사) --b경북대학교 대학원:c전자공학과 반도체공학전공,d1994  a실리콘a머시닝a가속도센서aMICROMACHININGaPOROUSaSILICONaFABRICATIONaACCELERATIONaSENSOR10aCho, Chan-Seob,d1965-  a전자공학과a반도체공학전공