01702nam a2200433 c 4500001001300000005001500013007000300028008004100031020003400072041001300106049002800119052001500147056001100162082001600173240005000189245011500239246002400354260004500378300004400423500005900467500008900526504003400615546004100649650005300690700002000743700005600763700005600819700005600875700005600931700005600987880002901043880004401072880002901116880002701145880002701172880002801199880003001227950001101257KMO20205716820240109094248ta201027s2020    ulkad         001   kor    a9788964214107g93550:c\350001 akorheng0 lEM7758165lEM7758166c201a569b20-18  a5692601a621.38122300aFoundations of MEMS.l한국어0KAT202400686006880-01aMEMS의 기초 /dChang Liu 지음 ;e최범규,e이재영,e이희철,e임시형,e장성필 옮김19aFoundations of MEMS  6880-02a서울 :b한티미디어,c2020  axxiv, 658 p. :b삽화, 도표 ;c24 cm  aMEMS는 "Micro Electro Mechanical System"의 약어임  a권말부록: Material Properties ; Frequently Used Formulas for Beams and Membranes  a참고문헌과 색인 수록  a영어 원작을 한국어로 번역 8a마이크로 머신[micromachine]0KSH20000251941 aLiu, Chang4aut1 6880-03a최범규,g崔範圭,d1957-0KAC2017279601 6880-04a이재영,g李在永,d1961-0KAC2013001771 6880-05a이희철,g李禧哲,d1973-0KAC2017399101 6880-06a임시형,g林時亨,d1971-0KAC2017031531 6880-07a장성필,g張聖弼,d1969-0KAC201414758006245-01/(BaMEMS ui gicho  6260-02/(BaSeoul :bHanti Midieo,c20201 6700-03/(BaChoe, Beomgyu1 6700-04/(BaI, Jaeyeong1 6700-05/(BaI, Huicheol1 6700-06/(BaIm, Sihyeong1 6700-07/(BaJang, Seongpil0 b\35000