01117nam a2200301 i 4500001001300000005001500013007000300028008004100031040002400072041001300096049001800109052001700127056001100144082001400155100003600169245021300205264004600418300004400464336002600508337002800534338002700562500002500589502010700614504002800721546003400749900001500783900001700798KDM20201791520200724121823ta200325s2020    bnka     m FC 000   eng    a011001c011001erda0 aengbkor0 lWM981136fWDP02a621.8b20-72  a5502601a621.82231 a이다솔,d1991-0KAC20186338510aHybrid slurry supply system using ionization and atomization for sustainable CMP =x지속 가능한 CMP를 위한 분무 및 이온화 기능을 갖춘 하이브리드 슬러리 공급시스템 /dLee, Dasol 1aBusan :bPusan National University,c2020  aXI, 197 pages :billustrations ;c30 cm  atextbtxt2rdacontent  aunmediatedbn2rdamedia  avolumebnc2rdacarrier  aAdviser: Jeong Haedo1 aThesis(Ph.D.) --bGraduate School, Pusan National University,cSchool of Mechanical Engineering,d2020  aIncludes bibliographies  aIn English; summary in Korean10aLee, Dasol10aJeong, Haedo