00945nam a2200205 k 4500001001300000005001500013008004100028041001300069049003200082052002100114056001300135082001400148100004800162245020800210260003600418300003200454502009300486653012600579963003400705KDM20003207920180823131016001011s1999    tjka       MB 000   kor  0 akorbeng0 lEM2150663lEM2150664c2fDP01a423.4b신724ㅅ  a423.4240 a533.52211 a신용현,g申容賢,d1961-0KAC20172500210a四重極 質量分析器(QMS)를 利用한 部分壓 測定 및 眞空 特性評價=xPartial pressure measurement and evaluation of vacuum characteristics using quadrupole mass spectrometer/d申容賢  a대전:b忠南大學校,c1999  avii, 138장:b삽도;c26cm1 a학위논문(박사) --b충남대학교 대학원:c물리학과 물리학전공,d1999  a사중극a질량분석기aQMSa부분압a진공aPARTIALaPRESSUREaMEASUREMENTaVACUUMaQUADRUPOLEaMASS SPECTROMETER  a물리학과a물리학전공