01106nam a2200253 c 4500001001500000005001500015008004100030040001900071041001300090049003100103052002200134056001400156082001500170100004800185245016800233260003600401300003700437502008600474653014500560740008000705950002100785963002600806965002000832KDM199203802  19941011193356920810s1991    ulkaf      AK 000   kor    a011001c0110010 akorbeng0 lEM914807lEM1015287c2fDP01a530.48b김683ㅍ  a530.48230 a620.142191 a김영진,g金英進,d1958-0KAC20184848200a플라즈마 화학기상 증착법에 의한 ZnO 박막 증착 및 특성 연구=xDeposition and characterization of ZnO thin films prepared by PECVD/d김영진  a서울:b서울대학교,c1991  axi,142장:b삽도,도판;c26cm1 a학위논문(박사) --b서울대학교 대학원:c무기재료공학과,d1991  a플라즈마a화학기상a증착법aZNOa박막a증착a특성aDEPOSITIONaCHARACTERIZATIONaTHINaFILMSaPREPAREDaPECVDa제드엔오0 a플라즈마 화학기상 증착법에 의한 제드엔오 박막 증착...1 a비매품b\7200  a무기재료공학과  a반도체박막