01288nam a2200265 c 4500001001500000005001500015008004100030040001900071041001300090049003100103052002200134056002100156082002800177100004800205245023000253260003600483300003400519502008600553653021200639740008700851950002100938963002600959965002000985965001701005KDM199115614  19941011001138911205s1991    ulka       AK 000   kor    a011001c0110010 akorbeng0 lEM854442lEM1009944c2fDP01a530.43b한792ㅇ  a530.43a421.7230 a620.1892903a530.412191 a한택상,g韓擇相,d1952-0KAC20170776500aRF magnetron sputtering 방법에 의한 Y-Ba-Cu-O(-Ag) 고온초전도 박막의 제조 및 특성 연구=xFabrication and characterization of superconducting Y-Ba-Cu-O(-Ag) thin films by RF magnetron sputtering/d한택상  a서울:b서울대학교,c1991  av,124,[13]장:b삽도;c26cm1 a학위논문(박사) --b서울대학교 대학원:c무기재료공학과,d1991  aRFaMAGNETRONaSPUTTERINGa방법aYBACUOAGa고온초전a박막a제조a특성aFABRICATIONaCHARACTERIZATIONaSUPERCONDUCTINGaTHINaFILMSa알에프a마그네트론a스퍼터링a와이비에이시유0 a알에프 마그네트론 스퍼터링 방법에 의한 와이-비에이-시유...1 a비매품b\6800  a무기재료공학과  a이트늄합금  a박막이론