01026nam a2200241 c 4500001001500000005001500015008004100030040001900071041001300090049003000103052002300133056001500156082001600171100003600187245019300223260003600416300002900452502008000481653015900561950002100720963002000741965002300761KDM199106644  19941011212310910724s1990    ulka       AK 000   kor    a011001c0110010 akorbeng0 lEM817264lEM832663c2fDP01a581.835b주241ㅇ  a581.835230 a671.7352191 a주정훈,d1962-0KAC20170208010a이온 플레이팅의 플라즈마 특성해석 및 박막X선 회절 방법에 관한 연구=xPlasma characterization of ion plating and thin film X-ray diffraction analysis/d주정훈  a서울:b서울대학교,c1990  axv,176p.:b삽도;c26cm1 a학위논문(박사) --b서울대학교 대학원:c금속공학과,d1990  a이온a플레이팅a플라즈마a특성해석a박막Xa회절a방법aPLASMAaCHARACTERIZATIONaIONaPLATINGaTHINaFILMaXRAYaDIFFRACTIONaANALYSIS1 a비매품b\8200  a금속공학과  a이온플레이팅