00984nam a2200205 c 4500001001300000005001500013008004100028041001300069049003200082052001600114056001300130082001800143245027800161260003900439300004200478502014200520504002900662650003400691700005300725KDM20063181020200717133656060628s2006    ulkad      AL 000   kor  0 akorbeng0 lEM3634028lEM3634029c2fDP01a569.4b6-16  a569.4240 a621.3815222100a太陽電池 및 MEMS 素子로의 應用을 위한 RF PECVD 方法으로 合成시킨 DLC 薄膜에 關한 硏究=x(A)study on DLC thin film synthesized by RF plasma-enhanced chemical vapor deposition method for the application to solar cells and MEMS devices/d崔源錫  a서울:b成均館大學校,c2006  aviii, 140 p.:b삽화, 도표;c26 cm1 a학위논문(박사) --b成均館大學校 大學院,c電氣電子 및 컴퓨터工學科 電氣電子 및 컴퓨터工學專攻,d2006  a참고문헌: p. 131-138 8a박막[薄膜]0KSH19980080951 a최원석,g崔源錫,d1972-0KAC2013106874aut