00735nam a2200229 k 4500001001300000005001500013008004100028020003100069049002800100052001400128056001100142082001600153245012700169260003200296300003600328650005300364653000900417700004000426700001400466700001400480950001100494KMO20054612520190523172152051130s2004    tjka          000   kor    a8989453100g93560:c\240000 lEM3467804lEM3467805c201a569b5-12  a569240 a621.38122120a(알기 쉽고 재미있는)MEMS이야기=xMicro electoro mechanical systems/d윤준보;e조일주;e최윤석 [공]저  a대전:bKAIST Press,c2004  avi, 386p.:b색채삽도;c23cm 8a마이크로 머신[micromachine]0KSH2000025194  aMEMS1 a윤준보MEMS,d1971-0KAC2016333501 a조일주1 a최윤석0 b\24000