01185nam a2200313 i 4500001001300000005001500013007000300028008004100031040002400072041001300096049003100109052001800140056001300158082001500171100004800186245021100234264003900445300005300484336002600537337002800563338002700591500002300618502011500641504003100756546003400787900002100821900001500842900001400857KDM20185991120200727172140ta171109s2017    ulka     m AX 000   eng    a011001c011001erda0 aengbkor0 lWM884682lWM884683c2fWDP02a620.11b18-77  a530.42601a620.112231 a홍성철,g洪成哲,d1985-0KAC20188322111a(The) study of photon shot noise effect in EUVL by using attenuated PSM =x감쇠형 위상변위 마스크를 이용한 극자외선 리소그래피의 포톤 샷 노이즈 효과 연구 /dSeong Chul Hong 1aSeoul :bHanyang University,c2017  axvii, 101 leaves :bcolor illustrations ;c26 cm  atextbtxt2rdacontent  aunmediatedbn2rdamedia  avolumebnc2rdacarrier  aAdviser: 安鎭浩1 aThesis(Ph.D.) --bGraduate School, Hanyang University,cDepartment of Materials Science and Engineering,d2017  aBibliography: leaves 93-97  aIn English; summary in Korean10aHong, Seong Chul10aAhn, Jinho10a안진호