00654nam a2200217 k 4500001001500000005001500015008004100030020002200071040001900093049002800112052002100140056001300161082001800174245004300192260003600235300003000271504004300301653002800344700005300372950001100425KMO199912630  20180605161529990524s1999    ulka          001   kor    a8970501924g93560  a011001c0110010 lEM1848690lEM1848691c201a569.4b황724ㅂ  a569.4240 a621.3815222100a반도체 공정기술/d황호정 著  a서울:b생능출판사,c1999  axii,572p.:b삽도;c26cm  a참고문헌 : p.507-539, 색인수록  a반도체a공정기술1 a황호정,g黃好正,d1946-0KAC2014243584aut0 b\22000