00956nam a2200193 c 4500001001300000005001500013008004100028041001300069049003200082052001500114056002000129082002900149245021100178260003900389300003000428502013800458653011900596700004700715KDM20041427520040422095955040421s2004    ulka       AL 000   kor  0 akorbeng0 lEM3014887lEM3014888c2fDP01a569.4b4-7  a569.4a569.4240 a621.38152a621.3815222100aMEMS 공정에 의한 PZT 박막의 강유전 특성과 FBAR로의 응용에 관한 연구=x(A)study on the ferroelectric properties of PZT thin film and its application to FBAR by MEMS processing/d朴暎  a서울:b成均館大學校,c2004  aiv, 115p.:b삽도;c26cm1 a학위논문(박사) --b성균관대학교 대학원:c전기전자및컴퓨터공학과 전기전자및컴퓨터공학전공,d2004  aMEMSaPZT박막a강유전aFBARaFERROELECTRIC PROPERTIESaTHIN FILMa전기공학a전자공학a컴퓨터공학1 a박영,g朴暎,d1973-0KAC2018383084aut