01246nam a2200253 k 4500001001300000005001500013008004100028041001300069049003200082052001600114056001400130082001800144245020100162260003600363300003100399502011300430650004000543650004700583650003400630650003200664653011000696700004800806963013800854KDM20033071820170324141743030709s2003    icka       HF 000   kor  0 akorbeng0 lEM2850384lEM2850385c2fDP01a569.41b3-4  a569.41240 a621.3815222100a저저항온도계수인 박막저항의 제조 및 전기적 특성=xFabrications and electrical properties of the thin film resistors with low temperature coefficient of resistance /d李鵬周  a인천:b仁荷大學校,c2003  axi, 111장:b삽도;c26cm1 a학위논문(박사) --b인하대학교 대학원:c전기공학과 전기에너지 및 재료전공,d2003 8a반도체[半導體]0KSH1998000581 8a전기 재료[電氣材料]0KSH1998004762 8a박막[薄膜]0KSH1998008095 8a스퍼터링0KSH1998031362  a저저항온도계수a스퍼터링a박막a반도체회로a박막저항a전기에너지a전기재료1 a이붕주,g李鵬周,d1973-0KAC201712334  a전기공학과a전기에너지a및a재료전공a반도체[반도체]a전기a재료[전기재료]a박막[박막]a스퍼터링