01044nam a2200217 k 4500001001300000005001500013008004100028041001300069049003200082052001500114056001300129082001400142245022900156260003600385300003200421502008600453653018400539700005300723900002400776963002600800KDM20030536220200901130453030218s2002    kjka       QC 000   kor  0 akorbeng0 lEM2742879lEM2742880c2fDP01a559.9b3-5  a559.9240 a629.822100a平面 X-Y 스테이지의 超精密位置決定을 위한 最適設計 및 制御시스템 開發=x(The)development of optimal design and control system for ultra-precision positioning on single plane X-Y stage/d韓在鎬  a광주:b朝鮮大學校,c2002  axiv, 134장:b삽도;c26cm1 a학위논문(박사) --b조선대학교 대학원:c정밀기계공학과,d2002  a평면aX-Ya마이크로a스테이지a초정밀위치결정a최적설계a제어시스템aOPTIMALaDESIGNaCONTROLaSYSTEMaULTRA-PRECISIONaPOSITIONINGaSINGLEaPLANEaSTAGE1 a한재호,g韓在鎬,d1968-0KAC2018308994aut10aHan, Jae-Ho,d1968-  a정밀기계공학과