01245nam a2200265 c 4500001001300000005001500013007000300028008004100031040001100072041001300083052003300096245023600129300002400365545008000389545010000469545003600569653009900605700001900704700004800723700001400771773014000785900001700925900001900942900001800961KSI00089168520111005170453ta110808s2008    ulk           000   kor    a0110010 akorbeng01a547.05b한547ㅎc5(1)-5(4)00a반도체 클린룸용 에어와셔의 암모니아 제거성능 개선 연구 =x(A)study on ammonia removal performance improvement of an air washer for semiconductor manufacturing clean rooms /d송근수,e유경훈,e손승우  ap. 151-157 ;c26 cm  a송근수, 한국생산기술연구원 에어로졸·오염제거 연구실  a유경훈, 한국생산기술연구원 에어로졸·오염제거 연구실bkhyoo@kitech.re.kr  a손승우, (주)성림피에스  aAir washeraHot water contact heat exchangeraGas removal efficiencyaWater vapor condensation1 a송근수4aut1 a유경훈,g兪京勳,d1965-0KAC2017456171 a손승우0 t한국실내환경학회지.d한국실내환경학회.g5권 2호(2008년 6월), p. 151-157q5:2<151w(011001)KSE200402363,x1738-412510aSong, Gunsoo10aYoo, Kyunghoon10aSon, Seungwoo