01674nam a2200349 c 4500001001300000005001500013007000300028008004100031040001100072041001300083052002500096245022900121300002600350545008100376545005600457545005600513545005600569545006400625653019900689700004100888700001400929700003600943700004800979700004801027773013901075856002101214900001901235900001701254900001501271900001701286900002101303KSI00083346520100814135607ta100721s2004    ulk           000   kor    a0110010 akorbeng01a550.5b대446c28(9)00a펨토초레이저와 자기조립박막을 이용한 나노스케일 패터닝 =xNanoscale patterning using femtosecond laser and self-assembled monolayers(SAMs) /d장원석,e최무진,e김재구,e조성학,e황경현  ap. 1270-1275 ;c26 cm  a장원석, 회원, 한국기계연구원 나노공정그룹bpaul@kimm.re.kr  a최무진, 한국기계연구원 나노공정그룹  a김재구, 한국기계연구원 나노공정그룹  a조성학, 한국기계연구원 나노공정그룹  a황경현, 회원, 한국기계연구원 선임연구부장  a펨토초레이저a근접장현미경a자기조립박막a나노스케일 패터닝aFemtosecond laseraNear-field scanning optical microscopeaSelf-assembled monolayersaNano-scale patterning1 a장원석,d1972-0KAC2018255494aut1 a최무진1 a김재구,d1967-0KAC2018525481 a조성학,g趙聖學,d1970-0KAC2018493901 a황경현,g黃瓊玹,d1952-0KAC2016243310 t대한기계학회논문집.d대한기계학회.g28권 9호(2004년 9월), p. 1270-1275q28:9<1270w(011001)KSE199600637,x1226-487340u75075555aKd00010aChang, Wonseok10aChoi, Moojin10aKim, Jaegu10aCho, Sunghak10aWhang, Kyunghyun