01319nam a2200313 c 4500001001300000005001500013007000300028008004100031040001100072041001300083052003400096245014000130300002400270545006600294545005900360545005900419545005900478653010500537700004100642700001400683700003600697700003600733773014600769856002100915900001700936900001700953900001700970900001800987KSI00080582720100625104214ta100504s2004    ulk           000   kor    a0110010 akorbeng01a552.05b한438ㅎㅅc2004(1)00a진공용 나노스테이지 개발 =xDevelopment of nano stage for ultra high vacuum /d홍원표,e강은구,e이석우,e최헌종  ap. 472-477 ;c26 cm  a홍원표, 한국생산기술연구원bwonpyodr@kitech.re.kr  a강은구, 한국생산기술연구원 나노가공팀  a이석우, 한국생산기술연구원 나노가공팀  a최헌종, 한국생산기술연구원 나노가공팀  a진공a나노스테이지aNano stageaFIBaFocused ion beamaUltra high vacuumaMaterial treatment1 a홍원표,d1971-0KAC2018492884aut1 a강은구1 a이석우,d1966-0KAC2016147001 a최헌종,d1955-0KAC2017038641 t(한국공작기계학회)학술대회 논문집.d韓國工作機械學會.g2004 春季(2004), p. 472-477q2004:1<472w(011001)KSE20020194340u45015443aKd00210aHong, Wonpyo10aKang, Eungoo10aLee, Seokwoo10aChoi, Honzong