01216nam a2200265 c 4500001001300000005001500013007000300028008004100031040001100072041001300083052003700096245025400133300002400387545005000411545005000461545006900511653010600580700001900686700001400705700004800719773013300767900001600900900001700916900001700933KSI00077280420091005100712ta090710s2005    ulk           000   kor    a0110010 akorbeng01a530.405b한596ㅎc15(7)-15(12)00a수열처리에 의한 세리아가 코팅된 실리카 연마재의 제조 및 oxide film의 연마특성 =xPreparation of ceria coated silica abrasive by hydrothermal treatment and polishing rate on oxide film /d유대선,e김대성,e이승호  ap. 818-823 ;c30 cm  a유대선, 요업기술원 복합재료센터  a김대성, 요업기술원 복합재료센터  a이승호, 요업기술원 복합재료센터bshlee@kicet.re.kr  a수열처리a세리아aCeria coated silicaaHydrothermal treatmentaCMPaAbrasiveaNano-sized ceria1 a유대선4aut1 a김대성1 a이승호,g李承浩,d1954-0KAC2018469490 t한국재료학회지.d韓國材料學會.g15권 12호(2005년 12월), p. 818-823q15:12<818w(011001)KSE199509224,x1225-056210aRyu, Daesun10aKim, Daesung10aLee, Seungho