01252nam a2200265 c 4500001001300000005001500013007000300028008004100031040001100072041001300083052002800096245021900124300002400343545005900367545005900426545005900485653011500544700005300659700004800712700004800760773012400808900001800932900001800950900001800968KSI00078376620090917115425ta090818s1992    ulk           000   kor    a0110010 akorbeng01a570.5b대495ㄷc36(1)00a반도체급 삼염화실란 중의 극미량 인의 분광광도법적 정량 =xSpectrophotometric determination of traces of phosphorus in semiconductor-grade trichlorosilane /d金東權,e韓明完,e金希永  ap. 255-260 ;c26 cm  a김동권, 한국화학연구소 화학공학연구부  a한명완, 한국화학연구소 화학공학연구부  a김희영, 한국화학연구소 화학공학연구부  a분광광도법적 정량a삼염화실란aTrichlorosilaneaSpectrophotometric determinationa인aPhosphorus1 a김동권,g金東權,d1951-0KAC2018468194aut1 a한명완,g韓明完,d1960-0KAC2017044001 a김희영,g金希永,d1954-0KAC2018470660 t대한화학회지.d대한화학회.g36권 2호(1992년 3월), p. 255-260q36:2<255w(011001)KSE199508487,x1017-254810aKim, Dongkwon10aHan, Myungwan10aKim, Heeyoung