01575nam a2200337 c 4500001001300000005001500013007000300028008004100031040001100072041001300083052003000096245033200126300002600458545005000484545005000534545003700584545005800621545005800679653017900737700003300916700001400949700001400963700001400977700002800991773013401019900001601153900001501169900001801184900001801202900001701220KSI00066796720081105164329ta080619s1999    ulk           000   kor    a0110010 akorbeng01a539.9505b한537ㅅc9(6)00a준 경험기법을 이용한 고집적 반도체공장의 미진동 제어를 위한 구조물의 동적설계에 관한 연구 =x(A)study on the structural dynamic design for sub-micro vibration control in high class semiconductor factory by semi-empirical method /d이홍기,e백재호,e원영재,e박해동,e김두훈  ap. 1227-1233 ;c28 cm  a이홍기, 정회원, RMS Technology Co., LTD  a백재호, 정회원, RMS Technology Co., LTD  a원영재, 금오공과대학교  a박해동, 정회원, 유니슨산업 기술연구소  a김두훈, 정회원, 유니슨산업 기술연구소  a진동허용규제치a구조물동적설계a준 경험법a미진동제어aVibration criteriaaStructure dynamic designaSemi empirical methodaSub-micro vibration control1 a이홍기0KAC2018L06544aut1 a백재호1 a원영재1 a박해동1 a김두훈0KAC2020490200 t소음·진동.d한국소음진동공학회.g9권 6호(1999년 12월), p. 1227-1233q9:6<1227w(011001)KSE199508541,x1226-092410aLee, Hongki10aPak, Jaeho10aWon, Youngjae10aPark, Haedong10aKim, Doohoon