00819nam a2200241 c 4500001001300000005001500013007000300028008004100031020002500072049002800097052001600125056001300141082001800154245006600172260005900238300005400297440003900351504002700390650004700417700004800464700004800512950001700560KMO20120692920120305105320ta120208s2011 tjkad 000 kor  a9788962118230g935600 lEM5306690lEM5306691c201a569.4b12-2 a569.42501a621.3815222100aTSV를 이용한 3D IC 집적 기술 /d여운동,e최광성 a[대전] :b한국과학기술정보연구원,c[2011] a41 p. :b삽화(일부천연색), 도표 ;c26 cm00a미래유망기술 분석보고서 a참고문헌: p. 39-41 8a집적 회로[集積回路]0KSH19980005171 a여운동,g呂雲東,d1974-0KAC2012076821 a최광성,g崔光成,d1970-0KAC2012076831 a가격불명