01490nam a2200313 c 4500001001300000005001500013008004100028040001100069041001300080052003000093245022100123300002500344545005800369545005800427545005800485545005800543653018600601700005300787700003600840700001400876700004800890773013600938856002001074890000801094900001901102900001901121900001901140900001701159KSI00035603520041001013738040923s1998    ulk          b000   kor    a0110010 akorbeng01a559.705b대445ㄷc36(5)00a위치 민감 검출기를 이용한 몰리브덴 박막의 잔류응력 해석=xAnalysis of residual stress in textured Mo thin films with position sensitive detector/d辛粲善,e趙宰炯,e崔時熏,e吳奎煥  ap. 1222-1227;c30 cm  a신찬선, 서울대학교공과대학재료공학부  a조재형, 서울대학교공과대학재료공학부  a최시훈, 서울대학교공과대학재료공학부  a오규환, 서울대학교공과대학재료공학부  a위치 민감 검출기a몰리브덴 박막a잔류응력aStressaThin filmaX-ray diffractionaPosition sensitive detectoraMultichannel analyzeraSin² methodaStoney's equation1 a신찬선,g辛粲善,d1974-0KAC2016269024aut1 a조재형,d1970-0KAC2018478391 a최시훈1 a오규환,g吳奎煥,d1957-0KAC2017359370 t대한금속학회지.d大韓金屬學會.g제36권 8호(1998년 8월), p. 1222-1227q36:8<1222w(011001)KSE199508414,x0253-384740u3234353aKd000  b65310aShin, Chan-Sun10aCho, Jae-Hyung10aChoi, Shi-Hoon10aOh, Kyu-Hwan