01054nam a2200229 c 4500001001300000005001500013008004100028040001100069041001300080052003100093245023500124300002500359545005300384545005300437653005900490700001900549700004800568773015200616856002000768900001800788900001800806KSI00034988820040923160921040915s2000    ulk           000   kor    a0110010 akorbeng01a559.705b대445ㄷc38(11)00aCVD 법으로 증착된 PZT 박막의 누설잔류 및 강유전 특성=xLeakage current characteristics and ferroelectric properties of lead zirconate titanate films deposited by chemical vapor deposition/d鄭璲鈺,e李元鐘  ap. 1559-1565;c30 cm  a정수옥, 한국과학기술원 재료공학과  a이원종, 한국과학기술원 재료공학과  aCVDaPZTa박막aLeakage curentaRuO₂a누설잔류1 a정수옥4aut1 a이원종,g李元鍾,d1957-0KAC2018376140 t대한금속ㆍ재료학회지.d대한금속.재료학회.g38권 11호(2000년 11월), p. 1559-1565q38:11<1559w(011001)KSE200000110,x0253-384740u3234959aKd00010aChung, Su Ock10aLee, Won Jong