01326nam a2200301 c 4500001001300000005001500013008004100028040001100069041001300080052003400093245022800127300002300355545005300378545005300431545005300484545005300537653012000590700001900710700004800729700001400777700001400791773012200805856002000927900002000947900001800967900001900985900002001004KSI00003632820040224103728031031s2000    tgk           000   kor    a0110010 akorbeng01a569.805b한536ㅅc9(4)-9(6)00aRF magnetron sputtering 법으로 제조된 LaFeO₃ 박막의 가스감지 특성=xGas sensing properties of LaFeO₃ thin films fabricated by RF magnetron sputtering method/d장재영,e마대영,e박기철,e김정규  ap. 357-364;c26 cm  a장재영, 경상대학교 전기전자공학부  a마대영, 경상대학교 전기전자공학부  a박기철, 경상대학교 전기전자공학부  a김정규, 경상대학교 전기전자공학부  aRF magnetron sputtering법aLaFeO₃a박막a가스감지aGas sensingaRF magnetron sputtering methodaThin films1 a장재영4aut1 a마대영,g馬大泳,d1956-0KAC2017046901 a박기철1 a김정규0 t센서학회지.d한국센서학회.g9권 5호(2000년 7월), p. 357-364q9:5<357w(011001)KSE199508532,x1225-547540u3316549aKd00010aJang, Jae-Young10aMa, Dae-Young10aPark, Ki-Cheol10aKim, Jeong-Gyoo