01197nam a2200265 c 4500001001300000005001500013008004100028040001100069041001300080052003400093245015600127300003000283545004700313545007300360545008800433653012500521700001900646700004800665700001900713773012100732856002000853900001800873900002000891900002000911KSI00004073320040127182658031010s2001    ulka          000   kor    a0110010 akorbeng01a570.5b한648ㅎc39(1)-39(3)00a고밀도 플라즈마 발생장치 2차원 모델링=xTwo-dimensional modeling of high-density plasma source/d이상덕,e신치범,eStas Berezhnoj  ap. 23-29:b삽도;c29 cm  a이상덕, 아주대학교 화학공학과  a신치범, 아주대학교 화학공학과bcbshin@madang-ajou.ac.kr  aStas Berezhnoj, Physical Technical Dept., st. Petersburg State Technical University  a고밀도a플라즈마a모델링aTwo-dimensional modelingaHigh-density plasmaaHelical resonatoraChlorine discharge1 a이상덕4aut1 a신치범,g愼治範,d1958-0KAC2017024431 aStas Berezhnoj0 t화학공학.d한국화학공학회.g39권 1호(2001년 2월), p. 23-29q39:1<23w(011001)KSE199509737,x0304-128X40u3091080aKd00010aLee, Sang Duk10aShin, Chee Burm10aBerezhnoj, Stas