01008nam a2200229 c 4500001001300000005001500013008004100028040001100069041001300080052003400093245013200127300003200259545005000291545007400341653008400415700005300499700004800552773012400600856001900724900001700743900001800760KSI00004053320040116182606031010s1999    ulka          000   kor    a0110010 akorbeng01a570.5b한648ㅎc37(4)-37(6)00aTiO₂박막의 원자층성장에 관한 연구=x(A)study on atomic layer growth of TiO₂ thin films/d부진효,e조성민  ap. 615-617:b삽도;c29 cm  a부진효, 성균관대학교 자연과학부  a조성민, 성균관대학교 화학공학과bsmcho@yurim.skku.ac.kr  a화학공학a원자층성장aAtomic layer epitaxyaTiO₂aRutileaThin films1 a부진효,g夫眞效,d1961-0KAC2017249354aut1 a조성민,g趙成珉,d1961-0KAC2018305360 t화학공학.d한국화학공학회.g37권 4호(1999년 8월), p. 615-617q37:4<615w(011001)KSE199509737,x0304-128X40u693932aKd00010aBoo, Jin-Hyo10aCho, Sung Min