01088nam a2200229 c 4500001001300000005001500013008004100028040001100069041001300080052002400093245021300117300003200330545008800362545005900450653011000509700004100619700001400660773013100674856002100805900001700826900001500843KSI00016317020080514150523031216s2002    ulka          000   kor    a0110010 akorbeng01a554.9405b한622ㅎ00aKOH 용액 및 KOH-IPA 혼합용액에 의한 단결정 실리콘의 이방성식각 특성=xAnisotropic etching characteristics of single crystal silicon by KOH and KOH-IPA solutions/d조남인,e천인호  ap. 249-255:b삽도;c26 cm  a조남인, 선문대학교 전자정보통신공학부bE-mail: nicho@sunmoon.ac.kr  a천인호, 선문대학교 전자정보통신공학부  aKOH용액aKOH-IPA혼합용액a단결정실리콘a이방성식각aAnisotropic etchingaCrystal silicon1 a조남인,d1950-0KAC2017070874aut1 a천인호0 t韓國眞空學會誌.d韓國眞空學會.g11권 4호(2002년 12월), p. 249-255q11:4<249w(011001)KSE199508370,x1225-882240u75013167aKd00210aCho, Nam-Ihn10aChon, Inho