01263nam a2200229 c 4500001001300000005001500013008004100028040001100069041001300080052003000093245026300123246008000386300003200466545007900498545007900577653014000656700005300796700001400849773012800863900002100991900002101012KSI00016067320090325114223031216s1998    ulka          000   kor    a0110010 akorbeng01a554.9405b한622ㅎc7(1)00aXPS를 이용한 Cu/Polyimide의 계면에 관한 연구n2,p고온에서 증착한 Cu의 초기성장과정=xStudy on the Cu/Polyimide interface using XPS, Initial growth of Cu sputter-deposited on the polyimide at high temperature/d이연승,e황정남30aInitial growth of Cu sputter-deposited on the polyimide at high temperature  ap. 135-140:b삽도;c26 cm  a이연승, 연세대학교 초미세표면과학연구센터, 물리학과  a황정남, 연세대학교 초미세표면과학연구센터, 물리학과  aXPSaPolyimidea계면a고온a증착aCua초기성장과정aSputter-depositedaInitialaGrowthaHighaTemperatureaInterfaceaUsing1 a이연승,g李延昇,d1963-0KAC2017463414aut1 a황정남0 t韓國眞空學會誌.d韓國眞空學會.g7권 2호(1998년 5월), p. 135-140q7:2<135w(011001)KSE199508370,x1225-882210aLee, Youn-Seoung10aWhang, Chung Nam