00794nam a2200181 c 4500001001300000005001500013008004100028040001100069041001300080052003000093245014600123300003000269545006000299653006800359700004100427773012500468900001900593KSI00015631120040209194229031215s1997    ulka          000   kor    a0110010 akorbeng01a554.9405b한622ㅎc6(1)00aRFI ionized magnetron sputtering에서 radial uniformity 문제=xRFI ionized magnetron sputtering에서 radial uniformity 문제/d주정훈  ap. 85-90:b삽도;c26 cm  a주정훈, 군산대학교 공과대학 재료공학과  aRFIaIonizedaMagnetronaSputteringaRadialaUniformitya문제1 a주정훈,d1962-0KAC2017020804aut0 t韓國眞空學會誌.d韓國眞空學會.g6권 1호(1997년 2월), p. 85-90q6:1<85w(011001)KSE199508370,x1225-882210aJoo, Jung Hoon