01143nam a2200253 c 4500001001300000005001500013008004100028040001100069041001300080052003000093245020700123300003200330545004700362545004700409545004700456653011900503700001900622700002800641700004800669773012900717900001400846900001400860900001500874KSI00015535520040219194219031215s1994    ulka          000   kor    a0110010 akorbeng01a554.9405b한622ㅎc3(1)00a이온펌프의 초고진공영역에서의 배기특성개선=x(The)improvement in pumping characteristics of sputter ion pumps in the ultra high vacuum(UHV) region/d김정선,e여환욱,e박종윤  ap. 401-404:b삽도;c26 cm  a김정선, 성균관대학교 물리학과  a여환욱, 성균관대학교 물리학과  a박종윤, 성균관대학교 물리학과  a이온펌프a초고진공영역a배기특성개선aPumping characteristicsaIon pumpsaUltra high vacuum region1 a김정선4aut1 a여환욱0KAC2020681081 a박종윤,g朴鍾允,d1950-0KAC2018038110 t韓國眞空學會誌.d韓國眞空學會.g3권 4호(1994년 11월), p. 401-404q3:4<401w(011001)KSE199508370,x1225-882210aKim, J.S.10aYeo, H.W.10aPark, C.Y.