01118nam a2200289 c 4500001001300000005001500013008004100028040001100069041001300080052002800093245015000121300003000271545002500301545002800326545005800354545002500412653008900437700001400526700001400540700005300554700001400607773013500621900001500756900001900771900002000790900001800810KSI00017244520040212184053031217s1993    ulka          000   kor    a0110010 akorbeng01a569.05b대483c30(1.1)00a집적화된 실리콘 압력센서의 제작=xFabrication of integrated silicon pressure sensor/d李甫那,e李英俊,e鄭勝閔,e李文基  ap. 22-30:b삽도;c26 cm  a이보나, 정회원  a이영준, 학생회원  a정승민, 준회원. 연세대학교 전자공학과  a이문기, 정회원  a집적화a실리콘압력센서aFabricationaIntegratedaSiliconaPressureaSensor1 a이보나1 a이영준1 a정승민,g鄭昇敏,d1968-0KAC2018021484aut1 a이문기0 t電子工學會論文誌.A.d大韓電子工學會.g30卷 6號(1993년 6월), p. 22-30q30:6<22w(011001)KSE199508730,x1016-135X10aLee, Bo Na10aLee, Young Jun10aJung, Seung Min10aLee, Moon Key