01328nam a2200289 c 4500001001300000005001500013008004100028040001100069041001300080052004000093245019800133300003200331545006600363545004700429545004700476545003000523653015400553700001900707700004800726700001400774700001400788773015800802900001800960900001900978900002300997900001801020KSI00005470620040209083406031010s2002    ulka          000   kor    a0110010 akorbeng01a569.205b한597ㅈㄱc15(7)-15(12)00aSLS 다결정 실리콘 TFT소자의 불량분석에 관한 연구=x(A)failure analysis of SLS polysilicon TFT devices for enhanced performances/d오재영,e김동환,e박정호,e박원규  ap. 969-975:b삽도;c26 cm  a오재영, 고려대학교 금속공학과bsolar@korea.ac.kr  a김동환, 고려대학교 금속공학과  a박정호, 고려대학교 전기공학과  a박원규, LG.philips-LCD  aSLSa다결정실리콘a불량분석aThin film transistoraTFTaSequential lateral solidificationaFocused ion beamaAutomatic spreading resistance1 a오재영4aut1 a김동환,g金東煥,d1959-0KAC2012208171 a박정호1 a박원규0 t전기전자재료학회논문지.d한국전기전자재료학회.gVol.15 no.11(2002년 11월), p. 969-975q15:11<969w(011001)KSE199800338,x1226-794510aOh, Jae Young10aKim, Dong Hwan10aPark, James Jungho10aPark, Won Kyu