01117nam a2200217 c 4500001001300000005001500013008004100028040001100069041001300080052004000093245021500133300003200348545008000380545005600460653012600516700005300642700001400695773015500709900001800864900001700882KSI00005468220040114083403031010s2002    ulka          000   kor    a0110010 akorbeng01a569.205b한597ㅈㄱc15(7)-15(12)00a기판온도와 Pd 함량에 대한 Co-Cr-Pd 자성 합금박막에서의 자기적 특성=xInfluence of Pd contents and substrate temperature on the magnetic property in Co-Cr-Pd films/d송오성,e이기영  ap. 812-817:b삽도;c26 cm  a송오성, 서울시립대학교 신소재공학과bsongos@uoscc.uos.ac.kr  a이기영, 서울시립대학교 신소재공학과  a기판온도a합금박막aSelf-organized nano structureaCo-Cr-Pd filmsaSubstrate temperatureaPd contentsaSputtering1 a송오성,g宋旿聲,d1964-0KAC2016375904aut1 a이기영0 t전기전자재료학회논문지.d한국전기전자재료학회.gVol.15 no.9(2002년 9월), p. 812-817q15:9<812w(011001)KSE199800338,x1226-794510aSong, Oh Sung10aLee, Ki Yung