01451nam a2200325 c 4500001001300000005001500013008004100028040001100069041001300080052003900093245019000132300003200322545007600354545004700430545004700477545004200524545004200566653010300608700005300711700001400764700001400778700003600792700004800828773015500876900002101031900001901052900001801071900001701089900001901106KSI00005445520040207083332031010s2001    ulka          000   kor    a0110011 akorbeng01a569.205b한597ㅈㄱc14(5)-14(8)00a금속박막형 압력센서의 제작과 그 특성=xFabrication of metal thin-film pressure sensor and its characteristics/d정귀상,e최성규,e남효덕,e이원재,e송재성  ap. 405-409:b삽도;c26 cm  a정귀상, 동서대학교 정보통신공학부bgschung@dongseo.ac.kr  a최성규, 영남대학교 전자공학과  a남효덕, 영남대학교 전자공학과  a이원재, KERI 신소재응용그룹  a송재성, KERI 신소재응용그룹  a금속박막a압력센서aMetal thin-film pressure sensoraTCRaTCSaNon-linearityaGauge factor1 a정귀상,g鄭貴相,d1961-0KAC2017072844aut1 a최성규1 a남효덕1 a이원재,d1963-0KAC2018460401 a송재성,g宋在成,d1956-0KAC2016376210 t전기전자재료학회논문지.d한국전기전자재료학회.gVol.14 no.5(2001년 5월), p. 405-409q14:5<405w(011001)KSE199800338,x1226-794510aChung, Gwiy-Sang10aChoi, Sung-Kyu10aNam, Hoy-Duck10aLee, Won-Jae10aSong, Jae-Sung