01439nam a2200289 c 4500001001300000005001500013008004100028040001100069041001300080052003900093245027000132300003200402545010400434545004500538545004200583545004200625653010000667700005300767700001400820700003600834700004800870773015500918900002101073900001901094900001701113900001901130KSI00005442720040207083328031010s2001    ulka          000   kor    a0110011 akorbeng01a569.205b한597ㅈㄱc14(1)-14(4)00aSOI와 트랜치 구조를 이용한 초저소비전력형 미세발열체의 제작과 그 특성=x(The)fabrication of micro-heaters with low consumption power using SOI and trench structures and its characteristics/d정귀상,e홍석우,e이원재,e송재성  ap. 228-233:b삽도;c26 cm  a정귀상, 동서대학교 정보시스템공학부 메카트로닉스전공bgschung@dongseo.ac.kr  a홍석우, 삼성종합기술원 MEMS팀  a이원재, KERI 신소재응용그룹  a송재성, KERI 신소재응용그룹  a트랜치구조a미세발열체aMicro-heateraSOI membraneaTrenchaPt-RTDaConsumption power1 a정귀상,g鄭貴相,d1961-0KAC2017072844aut1 a홍석우1 a이원재,d1963-0KAC2018460401 a송재성,g宋在成,d1956-0KAC2016376210 t전기전자재료학회논문지.d한국전기전자재료학회.gVol.14 no.3(2001년 3월), p. 228-233q14:3<228w(011001)KSE199800338,x1226-794510aChung, Gwiy-Sang10aHong, Seok-Woo10aLee, Won-Jae10aSong, Jae-Sung