01295nam a2200217 c 4500001001300000005001500013008004100028040001100069041001300080052003900093245022800132300003200360545011300392545004700505653026300552700005300815700001400868773015500882900002101037900001901058KSI00005431820040207083313031010s2000    ulka          000   kor    a0110010 akorbeng01a569.205b한597ㅈㄱc13(5)-13(8)00a측온저항체 온도센서가 집적화된 발열저항체형 마이크로 유량센서의 제작 및 특성=xFabrication and characteristics of hot-film type micro-flowsensors integrated with RTD/d정귀상,e홍석우  ap. 612-616:b삽도;c26 cm  a정귀상, 동서대학교 정보통신공학부 메카트로닉스공학전공bgschung@kowon.dongseo.ac.kr  a홍석우, 삼성종합기술원 MEMS Lab.  a발열저항체형a유량센서a미세발열체a측온저항체 온도센서a백금박막a산화마그네슘 박막a실리콘 멤브레인a시상수aHot-film typeaFlowsensoraMicro-heateraRTDaPt thin-filmaMgO thin-filmaSi membraneaResponse time1 a정귀상,g鄭貴相,d1961-0KAC2017072844aut1 a홍석우0 t전기전자재료학회논문지.d한국전기전자재료학회.gVol.13 no.7(2000년 7월), p. 612-616q13:7<612w(011001)KSE199800338,x1226-794510aChung, Gwiy-Sang10aHong, Seog-Woo