01358nam a2200253 c 4500001001300000005001500013008004100028040001100069041001300080052003300093245027300126300003200399545009600431545006800527545005300595653016000648700005300808700001400861700001400875773015500889900002001044900002001064900002001084KSI00005394420040114083221031010s1998    ulka          000   kor    a0110010 akorbeng01a569.205b한597ㅈㄱc11(1)00aMicroelectromechnical system 소자 제작을 위한 유기금속분해법에 의한 압전성 PZT(53/47)박막의 증착=xDeposition of piezoelectric PZT(53/47) film by metalorganic decomposition for microelectromechanical deviece/d윤영수,e정형진,e신영화  ap. 458-464:b삽도;c26 cm  a윤영수, 한국과학기술연구원 박막기술연구센타bysyoon@kistmail.kist.re.kr  a정형진, 한국과학기술연구원 박막기술연구센타  a신영화, 경원대학교 전기전자공학부  a유기금속분해법a압전성박막a압전계수aMicroelectromechanical systemaMEMSaPZT(53/47)aPiezoelectric coefficientaMetaorganic decomposition1 a윤영수,g尹榮秀,d1965-0KAC2017384494aut1 a정형진1 a신영화0 t전기전자재료학회논문지.d한국전기전자재료학회.gVol.11 no.6(1998년 6월), p. 458-464q11:6<458w(011001)KSE199800338,x1226-794510aYoon, Young-Soo10aJung, Hyung-Jin10aShin, Young-Hwa