01349nam a2200361 c 4500001001300000005001500013007000300028008004100031020003400072041001300106049002800119052001600147056001300163082001800176245014100194246004600335260003400381300004200415504003300457525003600490546004100526650006600567700004400633700003700677700004800714700001400762700004800776700004800824700004800872900003000920900002600950950001100976KMO20104670320181114145828ta101005s2010    ggkad         001   kor    a9788994464060g93560:c\190001 akorheng0 lEM4912695lEM4912696c201a569.4b10-9  a569.42501a621.3815222100a반도체 집적 공정 /d지은이: Gary S. May,eSimon M. Sze ;e옮긴이: 곽계달,e김태환,e박재근,e박종완,e전형탁19aFundamentals of semiconductor fabrication  a파주 :b교보문고,c2010  axv, 333 p. :b삽화, 도표 ;c26 cm  a참고문헌과 색인수록  a권말부록: 기호 목록 등  a영어 원작을 한국어로 번역 8a반도체 집적 회로[半導體集積回路]0KSH20000311191 aMay, Gary S.,d1964-0KAC2004038794aut1 aSze, S. M.,d1936-0KAC2004038801 a곽계달,g郭桂達,d1950-0KAC2015110971 a김태환1 a박재근,g朴在勤,d1959-0KAC2018283381 a박종완,g朴鍾完,d1948-0KAC2017206431 a전형탁,g全鎣卓,d1960-0KAC20170143410a메이, 게리 S.,d1964-10a스지, S. M.,d1936-0 b\19000