01211nam a2200349 c 4500001001300000005001500013007000300028008004100031020003400072041001300106049002800119052001300147056001100160082001400171245010700185246002400292260003700316300004400353504003300397525008900430546004100519650005300560700003000613700004800643700001400691700001400705700004800719700004800767900001500815900002000830950001100850KMO20094337820210923154958ta091013s2009    ulkad         001   kor    a9788991182981g93550:c\320001 akorheng0 lEM4620120lEM4620121c201a569b9-5  a5692401a621.322100aMEMS의 기초 /dChang Liu 지음 ;e최범규,e이재영,e이희철,e임시형,e장성필 옮김19aFoundations of MEMS  a서울 :b한티미디어,c2009  axxiv, 658 p. :b삽화, 도표 ;c25 cm  a참고문헌과 색인수록  a권말부록: Material properties ; Frequently used formulas for beams and membranes  a영어 원작을 한국어로 번역 8a마이크로 머신[micromachine]0KSH20000251941 a류창0KAC2021344574aut1 a최범규,g崔範圭,d1957-0KAC2017279601 a이재영1 a이희철1 a임시형,g林時亨,d1971-0KAC2017031531 a장성필,g張聖弼,d1969-0KAC20141475810aLiu, Chang10a류창,g刘畅0 b\32000