01518nam a2200397 c 4500001001300000005001500013007000300028008004100031020003400072041001300106049002800119052001700147056001300164082001800177240007200195245014100267246004600408260003700454300004200491500003600533504003400569546004100603650006600644700004400710700003700754700004800791700004800839700001400887700004800901700004800949900003000997900002601027900002601053900003001079950001101109KMO20241865620240327140415ta240326s2024    ulkad         001   kor    a9791191679205g93560:c\350001 akorheng0 lEM8753297lEM8753298c201a569.4b24-22  a569.42601a621.3815222300aFundamentals of semiconductor fabrication.l한국어0KAT20241316200a반도체 집적 공정 /d지은이: Gary S. May,eSimon M. Sze ;e옮긴이: 박재근,e곽계달,e김태환,e박종완,e전형탁19aFundamentals of semiconductor fabrication  a서울 :b텍스트북스,c2024  axi, 334 p. :b삽화, 도표 ;c26 cm  a권말부록: 기호 목록 등  a참고문헌과 색인 수록  a영어 원작을 한국어로 번역 8a반도체 집적 회로[半導體集積回路]0KSH20000311191 aMay, Gary S.,d1964-0KAC2004038794aut1 aSze, S. M.,d1936-0KAC2004038801 a박재근,g朴在勤,d1959-0KAC2018283381 a곽계달,g郭桂達,d1950-0KAC2015110971 a김태환1 a박종완,g朴鍾完,d1948-0KAC2017206431 a전형탁,g全鎣卓,d1960-0KAC20170143410a메이, 게리 S.,d1964-10a스지, S. M.,d1936-10aSze, Simon M.,d1936-10a스즈, 시몬 M.,d1936-0 b\35000